微電子學(xué)問(wèn)答題每日一練(2020.04.13)

縮寫(xiě)中文含義
APCVD         
HDPCVD
LPCVD     
PECVD
PVD       
BJT
CD          
CMOS
CMP
MIC
ILD  
MBE
SOI     
DUV
MOCVD
BSG
PSG
BPSG
RTP
RTA
IC   
LOCOS
STI  
LI
VLSI
CA
FIB
ARC
ASIC
RIE
FIB
EUV
LDD